Mattson Technology 303-16537-00 200mm Wafer Platen Heat/CL OEM Refurbished Part No: 03-15-02066

Part No: 03-15-02066

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The unit does not have a part number tag but matches the dimensions of both part numbers 02010-BA44 and 02110-BA44

Mattson Technology 303-16537-00 200mm Wafer Platen Heat/CL OEM Refurbished Part No: 03-15-02066Mattson Technology 303 16537 00 200mm Wafer Platen Heat CL OEM Refurbished Part No: 303 16537 00 Manufacturer Refurbished This Mattson Technology 303 16537 00 200mm Wafer Platen Heat CL is manufacturer refurbished surplus. The physical condition is good, but there may be signs of previous use and handling. Sale Details Item Condition: Manufacturer Refurbished, 90 Day Warranty Estimated Packed Shipping Dimensions: L x W x H = 16"x16"x16" @ 20 lbs.